« Back to Search« Back to SearchSearch » Installation, Servicing and Testing of a Tokyo Electron (TEL) ACT-8 Wafer Coater Developer Track.  University of Southampton

Installation, Servicing and Testing of a Tokyo Electron (TEL) ACT-8 Wafer Coater Developer Track.

  Southampton United Kingdom — University of Southampton
Published November 14, 2014
|
Notice type
Prior notice
Buyer category
Education
The University of Southampton has recently acquired a Tokyo Electron (TEL) ACT-8 wafer coater developer track from Intel. Installation of the track within our clean-room facility is now required as well as operator and technician training, on-going maintenance and parts and labour service cover. The instrument has been boxed for a number of years so it is anticipated some faults may occur on start-up and the successful bidder should have ready access to original TEL replacement parts. The instrument will be shipped in from abroad and positioned in the installation location by the University's approved shipping agent. The successful bidder will then need to install the track with qualification and final test of its operation to the standards expected by the OEM. (Original Equipment Manufacturer). The track will be used in a research environment for all of the processes associated with coating wafers with resist and developing exposed wafers (multiple substrate types). Reliable operation is essential and a fast response time within the parts and labour coverage is essential. Operator and process coaching is required. All coaching is required to the standards expected by the OEM. Some changes to the configuration of the track are required in order for it to operate in our facility. These are detailed both in this notice below and in the questionnaire document. In order to gauge operational and functional capabilities of systems and capability to successfully complete and test the instrument is up to standard we have developed a questionnaire that gathers this invitation. From this we aim to produce an invitation to tender document that satisfies this requirement.

Full tender details available only for Oppex usersSign in

Fact Sheet

Title
Installation, Servicing and Testing of a Tokyo Electron (TEL) ACT-8 Wafer Coater Developer Track.
Published by
University of Southampton
Publication Date
14/11/2014
Notice Type
Prior Information Notice
Has Documents
No
Abstract
The University of Southampton has recently acquired a Tokyo Electron (TEL) ACT-8 wafer coater developer track from Intel. Installation of the track within our clean-room facility is now required as well as operator and technician training, on-going maintenance and parts and labour service cover.The instrument has been boxed for a number of years so it is anticipated some faults may occur on start-up and the successful bidder should have ready access to original TEL replacement parts. The instrument will be shipped in from abroad and positioned in the installation location by the University's approved shipping agent. The successful bidder will then need to install the track with qualification and final test of its operation to the standards expected by the OEM. (Original Equipment Manufacturer).The track will be used in a research environment for all of the processes associated with coating wafers with resist and developing exposed wafers (multiple substrate types). Reliable operation is essential and a fast response time within the parts and labour coverage is essential.Operator and process coaching is required. All coaching is required to the standards expected by the OEM.Some changes to the configuration of the track are required in order for it to operate in our facility. These are detailed both in this notice below and in the questionnaire document.In order to gauge operational and functional capabilities of systems and capability to successfully complete and test the instrument is up to standard we have developed a questionnaire that gathers this invitation. From this we aim to produce an invitation to tender document that satisfies this requirement.
Main Contact
jdav@soton.ac.uk
Admin Contact
N/a
Technical Contact
N/a
Other Contact
N/a
Official Name
University of Southampton
Postal Address
University Road
Town
Southampton
Postal Code
SO17 1BJ
Country
UK
Contact Point
Procurement
Telephone
+44 2380594088
E-Mail
jdav@soton.ac.uk
Fax
+44 2380598029
General Address of the contracting authority (URL)
https://in-tendhost.co.uk/universityofsouthampton
Type of contract and place of delivery or of performance
1
Short description of nature and quantity or supplies or services
The University of Southampton has recently acquired a Tokyo Electron (TEL) ACT-8 wafer coater developer track from Intel. Installation of the track within our clean-room facility is now required as well as operator and technician training, on-going maintenance and parts and labour service cover. The instrument has been boxed for a number of years so it is anticipated some faults may occur on start-up and the successful bidder should have ready access to original TEL replacement parts. The instrument will be shipped in from abroad and positioned in the installation location by the University's approved shipping agent. The successful bidder will then need to install the track with qualification and final test of its operation to the standards expected by the OEM. (Original Equipment Manufacturer). The track will be used in a research environment for all of the processes associated with coating wafers with resist and developing exposed wafers (multiple substrate types). Reliable operation is essential and a fast response time within the parts and labour coverage is essential. Operator and process coaching is required. All coaching is required to the standards expected by the OEM. Some changes to the configuration of the track are required in order for it to operate in our facility. These are detailed both in this notice below and in the questionnaire document. In order to gauge operational and functional capabilities of systems and capability to successfully complete and test the instrument is up to standard we have developed a questionnaire that gathers this invitation. From this we aim to produce an invitation to tender document that satisfies this requirement.
Common Procurement Vocabulary (CPV)
Contract covered by the government procurement agreement (GPA)
No
Reserved contracts
No
Contract related to a project and/or programme financed by community fund
No
Date of dispatch of this notice
12-11-2014
Title attributed to the contract by the contracting authority
Installation, Servicing and Testing of a Tokyo Electron (TEL) ACT-8 Wafer Coater Developer Track.
Additional information
Operator and process coaching is required. All coaching is required to the standards expected by the OEM. Some changes to the configuration of the track are required in order for it to operate in our facility. These are listed below: 1. Currently the tool is configured to have its chemicals supplied from a global factory supply. We require all of the chemicals to be supplied from a local storage. The supply of any equipment and software modification to enable this is required; 2. Currently the tool has no provision for the storage of solvent waste. The university does not have a solvent drain and therefore we will need a modification to allow for solvent waste to be stored. (The university has an acid drain for acid waste). The supply of any equipment and software modifications to enable this is required; 3. The track is currently configured to interface directly to an AMSL exposure tool. We require direct interface with a Nikon s204 Scanner, and therefore appropriate changes to the interface should be carried out. The donated ACT 8 is in right to left configuration which is compatible with the right side in-line scanner to which it will interface. The supply of any equipment and software modification to enable this is required; 4. Currently the tool is configured to have only 4 resist/BARC options. Each resist/BARC is connected to both coater modules which means that the tool would only be able to coat wafers with these 4 options. We would like to reconfigure the tool such that each coater module can be connected to a different set of 4 resists/BARCs giving a total of 8 resist/BARC options for the tool. The supply of any equipment and software modification to enable this is required; 5. We would like an option for having low volume dispense. We would like one line on each of the coater modules converted to low volume dispense. The supply of any equipment and software modification to enable this is required. A way to provide parts and labour coverage for a period of 4 years after installation is required. Access to OEM approved replacement parts must be guaranteed for the entirety of this period. Regular preventative maintenance visits are required at intervals and to the standards as recommended by the OEM. Please note you are required to download and complete a questionnaire via In-tend. Please log on to our e-portal, located at https://in-tendhost.co.uk/universityofsouthampton/ If you are not already registered as a supplier with the In-tend Portal, you will need to register before accessing the tender documents. Once you have logged on as a supplier, click on current tenders and find the questionnaire document by clicking on 14/ESM/71. Further instructions for the submission of tender are below. Please note, to preserve the integrity of the procedure, all queries must made be via In-Tend. We look forward to receiving your response. Completion of PIN. 1. The process is being conducted electronically via In-tend. All responses and any supporting documentation must be submitted through this system. There must be no postal correspondence from bidders unless agreed by in advance by The University of Southampton. 2. The system will only permit you to submit one return. 3. Your response must be submitted through the — Submit My Return — facility in In-tend which is accessed via the ‘My Tenders’ icon, do NOT use the correspondence facility or a standard email. To submit your response, please follow the instructions below: — Log In; — My Tenders; — View Tender Details; — View Documents; — Browse and upload your response to the Questionnaire. Once ALL your response documents are uploaded and displayed in the — My Documents for Return — use — Submit My Return. 4. You are only permitted to submit once. The Closing Time and Date for receipt of submissions is 12 Noon on Thursday 27.11.2014. Please be aware that the system will automatically reject any late submissions. The responses to this PIN will be used to inform our procurement strategy. There will be no prejudice to any future procurement procedure by participation in this PIN.
Date of dispatch of this notice
Information added to the notice since publication.
Delivery Locations
Copyright © Sell2Wales
Further information can be obtained at
yes
Ministry or any other national or federal authority, including their regional or local sub-divisions
no
National or federal agency/Office
no
Regional or local Authority
no
Regional or local Agency/Office
no
Body governed by public law
yes
European Institution/Agency or International Organisation
no
General public services
no
Defence
no
Public order and safety
no
Environment
no
Economic and financial affairs
no
Health
no
Housing and community amenities
no
Social protection
no
Recreation, culture and religion
no
Education
yes

Oppex helps organizations with a professional approach to public sector sales, to either grow their business locally or find new opportunities abroad. We are the largest source of public procurement data in Europe. We process and translate public tenders from over 1.000 local, national and international procurement portals and have acquired over 8 million tenders in our database.


Trusted By

KONE
NHS
3M
ABB