Laseranneal-system for forming ohmic contacts by metal sintering of the backside (C-side) of SiC wafers and for dopand activation of implanted ions into the backside; annealing only of the backside, no significant temperature increase on the frontside, especially for thinned wafer in the thickness range below 100 µm. Fortsetzung in II.2.4).
Ergänzend zu II.1.4) clean room compatibility (cleanromm class 100); manual handling of 4" and 6" wafer (optional 8"); UV laser (355nm) with output power in the range of 7-10W; pulse width < 60ns; Galvano Scan; computer controlled: monitoring laser power, energy at wafer, beam profile, pulse shape; process atmosphere N2 and Ar; low footprinct; CE certification; training on-site.
Various laboratory furniture.
The tender concerns a Direktbelichter for lithographic patterning of layers on panel substrates. With the system Feinstleiterbahnen to be generated in panel format, so a resolution is down to the submicron necessary. The system must be designed for the exposure of polymeric materials which are sensitive in a wavelength range of 300 to 500nm. It must be possible the handling of substrates up to a size of 610x510 mm. Continued II.2.4.
Supplementary II.1.4) Substratmaterialein are silicon, Mold, Glass and PCB material. The device must meet the requirements of a class 1000 clean room. Within the closed device around a clean room class must be guaranteed 10th
The following minimum requirements must be met:
- Resolution of structures less than 1 .mu.m,
- Vector-based converting the designs,
- Substrate size up to 610x510mm,
- Handling of variable substrate sizes,
- Alignment accuracy in the range of 0.5 microns with exposure for bright field and dark field,
- The system must have a Aligenmentsystem,
- Automatic autofocus,
- Automatically adjusts to height differences over the substrate,
- Reading and processability GDSII and Gerber data must be provided.
Frequency range extensions for network analyzers:
Fraunhofer IIS to expand its existing network analyzers vectorial by frequency range extensions for the frequency range of 50 GHz to 110 GHz. The to be acquired Meters / frequency range extensions to the one in the laboratory directly to a network analyzer R & S ZVA 24 (with 4 ports) can be connected and on the other hand allow for capturing the full S-parameter matrix for 2 test ports. Moreover, measurements with variable power (power sweep) should be possible.