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Public tenders for industrial in Bonn Germany

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Industrial machinery

Deutsche Forschungsgemeinschaft e. V., Zentrale Beschaffungsstelle | Published April 15, 2017  -  Deadline May 14, 2017

Inductively Coupled Plasma (ICP) etching system with vacuum lock

is to be procured a tested system, which is among others suitable for nanostructuring of III-V compound semiconductors.

be optimized 50 mm diameter.

The system shall be within RIE fashion and fashion can be operated in ICP.

Substrate electrode suitable for fragments and up to 200 mm wafer (without tags)

Electrode temperature can be (-30 to + 80 ° C)

System footprint <= 170 cm x 65 cm

The offer should include:

vacuum system

8 MFC-controlled gas lines

vacuum lock

Laser interferometer for endpoint recognition

Control via software


The system must comply with the relevant current regulations, certifications and standards

The manufacturer should be able to guarantee good conduct process support

Implied warranties

Free delivery to location.

Inductively Coupled Plasma (ICP) etching system with vacuum lock

is to be procured a tested system, which is among others suitable for nanostructuring of III-V compound semiconductors

process chamber

Aluminum chamber by milling a solid aluminum block

Pump flange> = 200 mm for very high effective pumping speed

> = 40 mm flange with window + additional lateral port.

Plasma source and pumping system fully radially symmetrical to ensure best uniformity over a wide range of parameters.

ICP plasma chamber inner diameter of 50-80 mm.

80 ° C

Substrate electrode

> = 200 mm, suitable for fragments and up to 200 mm wafers

Helium backside cooling (software controlled) with mechanical clamping

Clamping device for wafers (2 ") included

Electrode temperature regulated (under software control) in the range -30 to + 80 ° C


The processing of substrates up to 200 mm diameter and debris must be possible without tags.

plasma sources

Substrate electrode

Power 300 W, 13.56 MHz

Aluminum dark space shield at ground potential

50 mm diameter

ICP type: helical

without capacitive component ie with (removable) electrostatic shield

ICP-Ceramics: Alumina

The system must be able to operate without mechanical changes in RIE mode and in ICP mode.

Power> 600 W (13.56MHz)

Both units for automatic frequency tuning (AMU) must have two controlled stepper motors vacuum capacity.

Reflected power <2% of forward power

Substrate electrode may be coupled.

vacuum system

Turbomolecular pump suitable type

Electric heating of the pump nozzle

Please offer as an option: dry-running pump suitable type (reactive gas resistant with N2 purge) and suction

8 MFC-controlled gas lines

5 MFC-controlled gas lines, 2 of which bypass and internally sealed metal MFC, one of them electrically heated

electropolished gas lines inside and outside and orbital welded, screwed only VCR

vacuum lock

Vacuum lock with a small volume <6 liters

30 cm x 50 cm

Aluminum chamber by milling a solid aluminum block

200 mm diameter)

Inter Chamber valve VAT MONOVAT

70 l / s suction capacity

Own dry pump with> = 15 m 3 / H

Pirani and Penning tubes for vacuum measurement

laser interferometer

Derivative, manual x / y table (drive range 10 mm in x and 10 mm in the y direction), built-in camera)

control Panel

The complete plant is from a PC (Preferred Operating system: Windows 10) are controlled


The system must meet the MESC standard.

The system should match the 200 mm SEMI-MESC standard.

Safety, CE

The system must meet the currently valid CE standards, in particular


Machinery Directive - 2006/42 / EC

Low Voltage Directive - 2006/95 / EC

EMC Directive 2004/108 / EC


Detection of environmental measures, for example the ISO 14001: 2004 certification


System footprint <= 170 cm x 65 cm

(Without backing pumps, PC, heater / chiller, Gas Pod)


3 days before arrival) to process evidence and Training

Local service

12 months warranty Free delivery to location.

Industrial clothing

Beschaffungsamt des Bundesministeriums des Innern | Published March 25, 2017  -  Deadline May 4, 2017

Mechanic suits, consisting of trousers and jacket, two-tone, in the version for men and women.

Industrial quality control services

Bundesministerium für wirtschaftliche Zusammenarbeit und Entwicklung (BMZ) | Published April 14, 2017  -  Deadline May 22, 2017
71731000, 79419000, 72225000

Subject of the tender is to carry out performance of the external quality control in the state implementing organization GIZ GmbH.

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